Semiconductor structure and method of manufacturing thereof
AssigneeNanya Technology Corporation
InventorShing-Yih Shih
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AssigneeNanya Technology Corporation
InventorShing-Yih Shih
Estimating the term…
A semiconductor structure includes a first component and a second component bonded thereof. The first component includes a first dielectric layer, a first conductive structure, and a first filling material layer. The first conductive structure is in the first dielectric layer and includes a first conductive line and a first conductive pad thereon. The first filling material layer is on the first conductive line and surrounds the first conductive pad. The second component includes a second dielectric layer, a second conductive structure, and a second filling material layer. The second dielectric layer is bonded to the first dielectric layer. The second conductive structure is in the second dielectric layer, and includes a second conductive pad bonded to the first conductive pad. The second filling material layer surrounds the second conductive pad and in contact with a second conductive line on the second conductive pad.
A semiconductor structure, comprising:
A method of manufacturing a semiconductor structure comprising:
Dependencies are inferred from the claim text.