Method of forming multi-threshold voltage devices using dipole-high dielectric constant combinations and devices so formed

A method for providing a gate structure for a plurality of components of a semiconductor device, the method comprising:

• providing a first dipole combination on a first portion of the plurality of components, the first dipole combination including a first dipole layer and a first high dielectric constant layer on the first dipole layer;
• providing a second dipole combination on a second portion of the plurality of components, the second dipole combination including a second dipole layer and a second high dielectric constant layer on the second dipole layer, the first dipole combination being different from the second dipole combination;
• providing a third dipole combination on a third portion of the plurality of components, the third dipole combination including a third dipole layer and a third high dielectric constant layer on the second dipole layer, the first dipole combination being different from the third dipole combination, the second dipole combination being different from the third dipole combination
• providing at least one work function metal layer on the first dipole combination and the second dipole combination;
• performing a low temperature anneal after the providing the at least one work function metal layer;
• and
• providing a contact metal layer on the work function metal layer.

A method for providing a gate structure for a plurality of components of a semiconductor device, the method comprising:

• providing a first dipole combination on a first portion of the plurality of components, the first dipole combination including a first dipole layer and a first high dielectric constant layer on the first dipole layer;
• providing a second dipole combination on a second portion of the plurality of components, the second dipole combination including a second dipole layer and a second high dielectric constant layer on the second dipole layer, the first dipole combination being different from the second dipole combination;
• providing at least one work function metal layer on the first dipole combination and the second dipole combination;
• providing a reactive metal layer on the at least one work function metal layer for at least some of the plurality of components;
• performing a low temperature anneal after the providing the at least one work function metal layer and after the providing the reactive metal layer;
• removing the reactive metal layer after the performing the low temperature anneal;
• and
• providing a contact metal layer on the work function metal layer after the performing the low temperature anneal and after the removing the reactive metal layer.

A method for providing a plurality of transistors on a semiconductor device, the method comprising:

• providing a source and a drain for each of the plurality of transistors, a channel for each of the plurality of transistors, being between the source and the drain;
• providing a gate structure on the channel for each of the plurality of transistors, the step of providing the gate structure comprising
• providing a first dipole combination on a first portion of the plurality of transistors, the first dipole combination including a first dipole layer and a first high dielectric constant layer on the first dipole layer, the first dipole combination residing on an interfacial oxide layer;
• providing a second dipole combination on a second portion of the plurality of transistors, the second dipole combination including a second dipole layer and a second high dielectric constant layer on the second dipole layer, the first dipole combination being different from the second dipole combination;
• providing a third dipole combination on a third portion of the plurality of components, the third dipole combination including a third dipole layer and a third high dielectric constant layer on the second dipole layer, the first dipole combination being different from the third dipole combination, the second dipole combination being different from the third dipole combination, the first dipole layer, the second dipole layer and the third dipole layer being selected from Lu2O3, LuSiOx, Y2O3, YSiOx, La2O3, LaSiOx, BaO, BaSiOx, SrO, SrSiOx, Al2O3, AlSiOx, TiO2, TiSiOx, HfO2, HfSiOx, ZrO2, ZrSiOx, Ta2O5, TaSiOx, ScO, ScSiOx, MgO, and MgSiOx, the first high dielectric constant layer, the second high dielectric constant layer and the third dielectric constant layer being selected from HfO2, ZrO2, HfSiOx, HfZrOx and ZrALOx, each of the first dipole combination, the second dipole combination and the third dipole combination being not thicker than two nanometers and not thinner than one nanometer;
• providing at least one work function metal layer on the first dipole combination and the second dipole combination, the at least one work function metal layer including at least one of TiN, TaN, TiSiN, TiTaN and TiTaSiN, the at least one work function metal layer being no thicker than three nanometers;
• providing a reactive metal layer on at least a portion of the work function metal layer, the reactive metal layer including at least one of Si, Ti, Zr, Hf and La;
• performing a low temperature anneal after the step of providing the reactive metal layer, the low temperature anneal having an anneal temperature of at least two hundred degrees Celsius and not more than six hundred degrees Celsius;
• removing the reactive metal layer after the step low temperature anneal;
• and
• providing a contact metal layer on the work function metal layer.