Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same

A lift pin assembly, comprising:

• a lift pin having a first longitudinal axis substantially parallel with a first direction;
• a pin connection block combined with a lower end portion of the lift pin, the pin connection block comprising a first guide recess and a second guide recess formed in a side surface of the pin connection block in a lower end portion of the pin connection block, wherein the first guide recess and the second guide recess are in communication with each other and extend in a second direction substantially perpendicular to the first direction respectively, and wherein the side surface of the pin connection block extends in the first direction
• a lift pin holder having a second longitudinal axis substantially parallel with the first direction, the lift pin holder comprising a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block and a second sliding portion to be received movably in the second direction within the second guide recess while a movement of the second sliding portion in the first direction is limited.