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US 10,770,334 B2Granted
Substrate holding device
AssigneeNgk Spark Plug Co., Ltd.
InventorsTomohiro Ishino, Shinya Kikuchi
Life of this patent
Estimating the term…
Abstract
A substrate holding device includes a base body that has a flat plate-like shape and in which gas holes that open in an upper surface of the base body are formed, and a plurality of protrusions that protrude upward from the upper surface of the base body. A groove that opens in a lower surface of the base body and that is connected to the gas holes is formed in the base body, and a plurality of protrusions that protrude downward are formed in the groove.
Claims20
A substrate holding device comprising:
- a base body having a flat plate-like shape and including:
- an upper surface;
- a lower surface;
- and
- a plurality of upper protrusions protruding upward from the upper surface;
- the base body defining:
- an elongated groove that opens on the lower surface with a bottom surface of the groove positioned a depth away from the lower surface of the base body;
- and
- at least one gas hole extending from the upper surface to the bottom surface of the elongated groove;
- the base body further including a plurality of first lower protrusions protruding downward from the bottom surface of the elongated groove.
7 more elements
A substrate holding device comprising:
- a base body having a flat plate-like shape and including:
- an upper surface;
- a lower surface;
- and
- a plurality of upper protrusions protruding upward from the upper surface;
- the base body defining:
- an elongated groove that opens on the lower surface with a bottom surface of the elongated groove positioned a depth away from the lower surface of the base body, the elongated groove extending radially from a center of the base body in one direction;
- and
- one or more gas holes extending through the base body from the upper surface of the base body to the bottom surface of the elongated groove with each of the gas holes located within the elongated groove;
- the base body further including a plurality of first lower protrusions protruding downward in-from the bottom surface of the elongated groove.
7 more elements
A substrate holding device comprising:
- a base body having a flat plate-like shape and including:
- an upper surface;
- a lower surface;
- and a plurality of upper protrusions protruding upward from the upper surface;
- the base body defining:
- an elongated groove that opens on the lower surface;
- and at least one gas hole extending from the upper surface to the elongated groove;
- the base body further including a plurality of first lower protrusions protruding downward in the elongated groove, each of the first lower protrusions having a frustum shape with a base angle of 700 or more and 85′ or less.
5 more elements
Dependencies are inferred from the claim text.