Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

A processing assembly comprising:

• a processing chamber for processing both sides of a plurality of substrates in a processing region of the processing chamber;
• and
• a substrate transportation system for transporting or positioning the plurality of substrates in the processing region;
• the substrate transportation system comprising a substrate holding device and a transportation device for transporting the substrate holding device, wherein the substrate holding device comprises:
• a carrier plate comprising a cavity, wherein the cavity extends from an upper side of the carrier plate through the carrier plate to a lower side of the carrier plate;
• a holding frame, which has a frame opening and a supporting surface for holding a substrate in the cavity, wherein the substrate is directly supported on the supporting surface, said supporting surface at least partially surrounding the frame opening, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity;
• wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate;
• and
• two holding regions at which the carrier plate can be supported for transporting the carrier plate, wherein the cavity is disposed between the two holding regions;
• wherein the transportation device has two holding elements in such a manner that the carrier plate of the substrate holding device is held only in the two holding regions.

A method for processing a substrate, the method comprising the following steps:

• inserting a holding frame for holding the substrate into a cavity in a carrier plate, wherein the holding frame has a supporting surface for supporting the substrate, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity;
• placing the substrate onto the supporting surface of the holding frame, wherein the substrate is directly supported on the supporting surface;
• and
• processing the substrate by a processing device through a frame opening while it is held in the cavity by means of the holding frame, wherein the processing device faces the frame opening;
• transporting the carrier plate, wherein the carrier plate is held only in two holding regions, between which the cavity is disposed.

A substrate holding device comprising:

• a carrier plate extending laterally;
• two supporting regions that are laterally next to each other and extend parallel to each other at which the substrate holding device can be supported in order for the latter to be transported;
• and
• a plurality of substrate placement regions that are disposed between the two supporting regions, each of said substrate placement regions comprising a cavity, which from an upper side of the carrier plate extends through the carrier plate to a lower side of the carrier plate, and each of said substrate placement regions comprising a holding frame which has a frame opening and a supporting surface for holding a substrate in the cavity, wherein the substrate is directly supported on the supporting surface, said supporting surface at least partially surrounding the frame opening;
• wherein the holding frame, when inserted into the cavity, partially rests on the carrier plate, wherein the cavity is substantially cuboid shaped and has four corner regions, and wherein the holding frame rests on the carrier plate only in the corner regions of the cavity.