Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus

A chamber, comprising:

• a fall-proof apparatus for cleaning semiconductor devices, the fall-proof apparatus comprising
• a nozzle, connecting with a carrier, that sprays chemical liquids to clean the semiconductor devices,
• a megasonic/ultrasonic wave generator that is fan-shaped, is fixed to the carrier, and generates megasonic/ultrasonic waves to clean the semiconductor devices, and
• a sensor that detects the distance between the megasonic/ultrasonic wave generator and the carrier and determines, based on the distance, whether the megasonic/ultrasonic wave generator is loose and going to fall;
• a chuck for holding and rotating the semiconductor devices;
• a swing-spray head swinging back and forth above the semiconductor devices and the chemical liquids or gas to clean the semiconductor devices;
• and
• at least two trays for flushing or cleaning the swing-spray head or the megasonic/ultrasonic wave generator,
• wherein, during a cleaning process, the megasonic/ultrasonic wave generator is immerged into the chemical liquids and generates the megasonic/ultrasonic waves to clean the semiconductor devices.