Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system

A substrate aligning apparatus comprising:

• a substrate support configured to carry a plurality of substrates, the substrate support including a plurality of pairs of arms, each pair of arms being configured to carry one of the plurality of substrates;
• a substrate aligner configured to rotate the plurality of substrates;
• and
• a controller including a non-transitory computer readable storage medium having stored therein a program that when executed performs an overall control of the substrate aligning apparatus, wherein the controller is configured to:
• receive deformation information of each of the plurality of substrates recorded in advance identifying positions of warped portions along an outer periphery edge of each of the plurality of substrates,
• rotate the plurality of substrates relative to the substrate support according to the received deformation information such that the warped portions of each of the plurality of substrates identified by the received deformation information are aligned to be offset relative to a front of the plurality of pairs of arms of the substrate support, and
• move each of the pairs of arms of the substrate support along each of the plurality of substrates from an outside of the outer periphery edge of each of the plurality of substrates toward a central portion thereof without being impeded by the warped portions of each of the plurality of substrates after the plurality of substrates are aligned.