Stage device and charged particle beam device
AssigneeHitachi High-Tech Corporation
InventorsMotohiro Takahashi, Masaki Mizuochi, Shuichi Nakagawa, Hironori Ogawa, Takanori Kato
Life of this patent
Estimating the term…
Abstract
The present invention relates to a charged particle beam device capable of suppressing table deformation caused by movement of a rolling element of a guide with a simple configuration, and a strain isolation guide structure, a stage using the guide structure, and a charged particle beam device using the stage are proposed, the strain isolation guide structure being characterized in that, in a sample stage including a linear guide including a carriage (201), a rolling element, and a guide rail (202), and a table (105), the carriage (201) and the table (105) are connected via an adapter (401) as an elastically deformable member.
Claims9
A sample stage to support a sample, the sample stage comprising:
- a table;
- a guide rail that extends in a moving direction;
- a carriage configured to move along the guide rail in the moving direction together with the table by rotation of a rolling element included inside the carriage;
- and
- an adapter connecting the table and the carriage,
- wherein the adapter has a first protruding portion protruding toward the carriage and connected the carriage, and the first protruding portion has a length in the moving direction which is longer than a length thereof in a direction orthogonal to the moving direction, and
- wherein the adapter has a second protruding portion protruding toward the table and connected to the table, and the second protruding portion has a length in the direction orthogonal to the moving direction which is longer than a length thereof in the moving direction.
A sample stage to support a sample, the sample stage comprising:
- a table;
- a guide rail that extends in a moving direction;
- a carriage configured to move along the guide rail in the moving direction together with the table by rotation of a rolling element included inside the carriage;
- and
- an adapter connecting the table and the carriage,
- wherein the adapter has a first contact portion in contact with the carriage along the moving direction and a second contact portion in contact with the table along a direction orthogonal to the moving direction,
- wherein a first clearance gap between the adapter and the carriage extends along the moving direction on both sides of the first contact portion, and a second clearance gap between the adapter and the table extends along the direction orthogonal to the moving direction on both sides of the second contact portion, and
- wherein the adapter is in contact with the table only at the second contact portion.
Dependencies are inferred from the claim text.