US 10,770,253 B2 · Switch arrangements for microelectromechanical systems

Abstract

Microelectromechanical system (MEMS) switches that provide low contact resistance over a large number of open and close contact cycles are disclosed. A MEMS switch device may include a plurality of parallel MEMS switches with a first MEMS switch that is configured differently in such a manner to close first and/or open last during open and close cycles. In this regard, the first MEMS switch may experience increased contact resistance over a large number of open and close cycles while other MEMS switches maintain a low contact resistance. In certain embodiments, the first MEMS switch is controlled by a different control signal to open and close differently than the other MEMS switches. In certain embodiments, a common control signal controls a plurality of MEMS switches and the first MEMS switch is mechanically different such that it opens and closes differently than other MEMS switches.

Claims20

Dependent claims

A microelectromechanical system (MEMS) switch device comprising:

a first MEMS switch configured to receive a first MEMS switch control signal;
a plurality of second MEMs switches configured to receive a second MEMS switch control signal that is different than the first MEMS switch control signal, wherein the first MEMS switch and the plurality of second MEMS switches are arranged in parallel with each other;
and
control circuitry configured to provide the first MEMS switch control signal and the second MEMS switch control signal.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

16/174,416Filed 30 Oct 2018 · us provisional application

Priority

1 Dec 2017

Published

US 2019/0172671 A16 Jun 2019

Granted

8 Sep 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification5 codes

H01H 59/0009
Electrostatic relays; Electro-adhesion relays: making use of micromechanics
H01H 9/38
Means for extinguishing or preventing arc between current-carrying parts: auxiliary contacts on to which the arc is transferred from the main contacts
H01H 9/40
Means for extinguishing or preventing arc between current-carrying parts: multiple main contacts for the purpose of dividing the current through,…
H01H 2059/0063
Making use of micromechanics: with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or…

Switch arrangements for microelectromechanical systems

Life of this patent

Switch arrangements for microelectromechanical systems

Life of this patent

Abstract

Claims20