Flow dividing system

A flow dividing system for dividing a single flow rate into a plurality of flow rates, and controlling respective flow rates so that a ratio between the divided flow rates becomes a preset flow ratio, the flow dividing system comprising:

• a branching mechanism configured to divide the single flow rate into the plurality of flow rates;
• a plurality of fluid control devices respectively configured to control the plurality of flow rates, said plurality of fluid control devices being formed as separate bodies from the branching mechanism, the plurality of fluid control devices being separated from and independent of each other;
• the plurality of fluid control devices comprising one master device, with the remainder being a slave device;
• the master device comprising a communication unit configured to transmit a preset flow rate value on the basis of the preset flow ratio to the slave device and configured to receive a flow rate detection value from the slave device;
• and
• the slave device comprising a communication unit configured to receive the preset flow rate value from the master device and configured to transmit the flow rate detection value to the master device, wherein
• each of the master and slave devices comprise as part thereof a base portion that defines an inflow port, a flow path, and an outflow port of a single flow rate of the plurality of divided flow rates,
• the base portion is formed into a block shape, and the inflow port and the outflow port of the base portion are formed on a bottom surface serving as an installation surface,
• the branching mechanism comprises a first block-shaped joint member that divides a single flow rate into a plurality of flow rates, the first block-shaped joint member comprising a top surface with a plurality of openings arranged therein,
• an interior of said branching mechanism provides a plurality of branching flow paths that respectively communicate with the plurality of openings, and a common flow path with the plurality of branching flow paths commonly connected thereto,
• each of the plurality of openings being directly connectable from the top with a respective one of the inflow ports of the master and slave devices and an outflow port of an upstream device, and
• the base portions of the master device and the slave device are each fixed to the first block-shaped joint member by fastening members, and each of the flow paths communicating with the inflow ports on the bottom surfaces of the master device and the slave device is connected to the flow path communicating with the openings on the top surface of the block-shaped joint member.