Method for back end planning and scheduling
AssigneeApplied Materials, Inc.
InventorDavid Everton Norman
Life of this patent
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Abstract
Embodiments presented herein provide techniques for planning and scheduling in a factory. The technique begins by generating a bottleneck loading plan from a plurality of inputs. A simulation is run using the bottleneck loading plan. The factory is simulated using decisions made based on the bottleneck loading plan and a lot-to-machine schedule is generated with the simulation bottleneck loading plan.
Claims14
A method for back end planning and scheduling a factory, the method comprising:
- generating a bottleneck loading plan for one or more families of equipment from a plurality of inputs;
- generating a simulation of the factory using the bottleneck loading plan;
- creating a model for the factory by running the simulation of the factory and using decisions based on the bottleneck loading plan and a block based workflow;
- and
- generating a lot-to-machine schedule with the model to control one of,
- one or more processes related to fabrication of semiconductor substrates;
- and
- one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
- publishing the lot-to-machine schedule to the factory;
- implementing what each equipment should work on next based on the generated lot-to-machine schedule;
- monitoring real-time factory data of the implemented schedule;
- comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation;
- and
- providing a notification if the deviation exceeds a threshold.
A non-transitory computer-readable medium containing computer program code that, when executed by a processor, performs an operation for back end planning and scheduling a factory, the operation comprising:
- generating a bottleneck loading plan from a plurality of inputs;
- running a simulation using the bottleneck loading plan;
- simulating the factory using decisions made based on the bottleneck loading plan;
- and generating a lot-to-machine schedule with the model to control one of,
- one or more processes related to fabrication of semiconductor substrates;
- and
- one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
- publishing the lot-to-machine schedule to the factory;
- implementing what each equipment should work on next based on the generated lot-to-machine schedule;
- monitoring real-time factory data of the implemented schedule;
- comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation;
- and
- providing a notification if the deviation exceeds a threshold.
A planning and scheduling system for a factory, wherein the factory comprises a plurality of work orders and one or more tools for processing the work orders, the scheduling system comprising:
- at least one processor;
- and
- a memory containing a program that, when executed by the at least one processor, performs an operation for planning and scheduling the factory, the operation comprising:
- generating a bottleneck loading plan from a plurality of inputs;
- running a simulation using the bottleneck loading plan;
- simulating the factory using decisions made based on the bottleneck loading plan;
- creating a model for the factory by running the simulation of the factory and using decisions based on the bottleneck loading plan and a block based workflow;
- and
- generating a lot-to-machine schedule with the model to control one of,
- one or more processes related to fabrication of semiconductor substrates;
- and
- one or more processes related to cutting, assembly, and testing of a semiconductor die on semiconductor substrates;
- publishing the lot-to-machine schedule to the factory;
- implementing what each equipment should work on next based on the generated lot-to-machine schedule;
- monitoring real-time factory data of the implemented schedule;
- comparing the real time factory data of the implemented schedule to the generated lot-to-machine schedule to determine a deviation;
- and
- providing a notification if the deviation exceeds a threshold.
Dependencies are inferred from the claim text.