Support apparatus, a lithographic apparatus and a device manufacturing method

A support apparatus configured to support an object, the support apparatus comprising:

• a support body comprising an object holder to hold an object;
• an opening in the support body adjacent to an edge of the object holder;
• a channel in fluid communication with the opening via a passageway in the support body;
• a passageway liner in the passageway, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the passageway;
• and
• a structure separate from the support body, the structure having a roof liner above at least a portion of the opening, the roof liner being thermally insulating to substantially thermally decouple the structure from fluid in the groove and/or the passageway.

A support apparatus configured to support an object, the support apparatus comprising:

• a support body comprising an object holder to hold an object;
• an opening in the support body adjacent to an edge of the object holder;
• a channel in fluid communication with the opening via a passageway in the support body;
• a passageway liner in the passageway, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the passageway,
• wherein the passageway liner extends across at least part of a gap arranged to be between the support body and an element structurally separate from the support body.