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OwnerVadim Rakhovsky, Vitaly Chernik +3inventors
InventorsVadim Rakhovsky, Vitaly Chernik, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev
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A system that contains a semi-ellipsoidal SLM holder supporting a plurality of flat rectangular SLMs, which are placed onto the semi-ellipsoidal surface of the holder in the most surface-covering way. The system contains a coherent light source placed in the first focal point of the ellipsoid. The second focal point of the ellipsoid defines the area in which an image-receiving object is to be placed. All the SLMs are illuminated by a diverging light beam emitted from the coherent light source. In each SLM, the light is subjected to phase-amplitude modulation and is converted into an image-carrying beam, which convergently fells onto the object on which the target image is to be produced. Thus, a pattern is formed on the object by a maskless method in which a plurality of SLMs are combined into a common image-forming holographic unit.
A system of maskless lithography for forming an image on an object with the use of a curvilinear hologram, the system comprising:
A method of maskless lithography with the use of a curvilinear hologram, the method comprising:
Dependencies are inferred from the claim text.