Hybrid MEMS scanning module
AssigneeApple Inc.
InventorsRaviv Erlich, Alexander Shpunt, Yuval Gerson
Life of this patent
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Abstract
A scanning device includes a base containing one or more rotational bearings disposed along a gimbal axis. A gimbal includes a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base. A mirror assembly includes a semiconductor substrate, which has been etched and coated to define a support, which is fixed to the gimbal, at least one mirror, contained within the support, and a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support.
Claims20
A scanning device, comprising:
- a base containing one or more rotational bearings disposed along a gimbal axis;
- a gimbal, comprising a shaft that fits into the rotational bearings so that the gimbal rotates about the gimbal axis relative to the base;
- a mirror assembly, comprising a semiconductor substrate, which has been etched and coated to define:
- a support, which is fixed to the gimbal;
- at least one mirror, contained within the support;
- and
- a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support;
- and
- a drive, comprising:
- a mirror drive assembly, which comprises at least one rotor comprising one or more permanent magnets, which are fixed to the at least one mirror, and a stator comprising at least one core, which is positioned in proximity to the at least one mirror and wound with one or more coils;
- a gimbal drive assembly, which is configured to rotate the gimbal about the gimbal axis;
- and
- drive circuitry, which is coupled to apply electrical currents to the gimbal drive assembly and to the one or more coils of the mirror drive assembly so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively.
A method for producing a scanning device, the method comprising:
- etching and coating a semiconductor substrate so as to define:
- at least one mirror;
- a support surrounding the at least one mirror;
- and
- a connecting member connecting the at least one mirror to the support and defining at least one mirror axis, about which the at least one mirror rotates relative to the support;
- fixing the support to a gimbal having a shaft;
- fitting the shaft into one or more rotational bearings that are held by a base on a gimbal axis, so that the gimbal rotates about the gimbal axis relative to the base;
- fixing at least one rotor, comprising one or more permanent magnets, to the at least one mirror;
- positioning a stator, comprising at least one core wound with one or more coils, in proximity to the at least one mirror;
- coupling a gimbal drive assembly to rotate the gimbal about the gimbal axis;
- and
- applying electrical currents to the gimbal drive assembly and to the one or more coils of the stator so as to cause the gimbal and the at least one mirror to rotate about the gimbal axis and the at least one mirror axis, respectively.
Dependencies are inferred from the claim text.