Enabling thermal efficiency on a silicon-on-insulator (SOI) platform
AssigneeFuturewei Technologies, Inc.
InventorsDawei Zheng, Ge Yi, Li Yang, Xiao Shen
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AssigneeFuturewei Technologies, Inc.
InventorsDawei Zheng, Ge Yi, Li Yang, Xiao Shen
Estimating the term…
A method for fabricating a photonic integrated circuit (PIC) comprises providing a silicon-on-insulator (SOI) wafer comprising an insulator layer disposed between a base semiconductor layer and a SOI layer, wherein the SOI layer comprises a waveguide, providing at least one slot within the SOI layer, wherein the at least one slot is positioned on the same or opposite sides of the waveguide, and wherein the at least one slot is positioned at a predetermined distance away from the waveguide, and removing a portion of the insulator layer to form an etched-out portion of the insulator layer, wherein the etched-out portion is positioned directly beneath the waveguide, and wherein a width of the etched-out portion is at least the width of the waveguide.
A photonic integrated circuit (PIC) for an optical device, comprising:
An apparatus, comprising:
A photonic integrated circuit (PIC) for an optical device, comprising:
Dependencies are inferred from the claim text.