Gas sensing device having distributed gas sensing elements and a method for sensing gas
AssigneesTodos Technologies Ltd., Technion Research & Development Foundation Limited
InventorsYael Nemirovsky, Amikam Nemirovsky, Shmuel Melman
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Abstract
A gas sensing device that includes a (a) gas reactive element that has a gas dependent temperature parameter; and (b) a semiconductor temperature sensing element that is spaced apart from the gas reactive element and is configured to sense radiation emitted from the gas reactive element and generate detection signals that are responsive to a temperature of the gas reactive element; wherein the gas reactive element and the semiconductor temperature sensing element are of microscopic scale.
Claims17
A gas sensing device, comprising gas sensing elements that comprise gas reactive elements, each gas reactive element has a gas dependent temperature parameter;
- and semiconductor temperature sensing elements, each semiconductor sensing element is configured to sense radiation emitted from one of the gas reactive elements and generate detection signals that are responsive to a temperature of the one of the gas reactive elements;
- wherein the gas reactive elements and the semiconductor temperature sensing elements are of microscopic scale;
- wherein the gas reactive elements and the semiconductor temperature sensing elements are spaced apart from each other;
- wherein a gas sensing element of the gas sensing elements comprises a gas reactive element and a semiconductor sensing element that is thermally coupled to the gas reactive element;
- wherein at least two gas sensing elements are configured to sense different gases;
- and
- wherein at least one of the following is true:
- (a) the gas sensing elements comprise a first plurality (N) of gas sensing elements that are configured, at a certain point in time, to differ from each other by their response to gases;
- wherein the gas sensing device is configured to detect a composition of up till N different gaseous materials by processing the detection signals from semiconductor temperature sensing elements thermally coupled to the N gas sensing elements;
- (b) at least one gas reactive element of the gas reactive elements is thermally coupled to a heating element of the gas sensing device, the heating element is configured to heat the at least one gas reactive element to multiple predefined temperatures that are associated with a sensing of multiple gases that differ from each other;
- wherein the heating element is configured to heat the at least one gas reactive element, at different points in time, to different predefined temperatures of the multiple predefined temperatures;
- (c) the at least one gas reactive element is thermally coupled to the heating element, the heating device is configured to heat, in a non-continuous manner, the at least one gas reactive element to at least one predefined temperature.
Dependencies are inferred from the claim text.