US 10,768,133 B2 · Integrated SMO gas sensor module

Abstract

Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.

Claims16

Dependent claims

A gas sensor array, comprising:

a substrate;
and
a plurality of solid state gas sensor array elements on the substrate, each of the plurality of solid state gas sensor array element including:
a semiconductor metal oxide (SMO) sensor on the substrate;
a temperature sensor on the substrate;
a heater on the substrate;
an air gap, the SMO sensor, the temperature sensor, and the heater being spaced from the substrate by the air gap;
supports that extend through the air gap;
a first signal line coupled to the SMO sensor;
a second signal line coupled to the temperature sensor;
and
a third signal line coupled to the heater.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application

15/723,661Filed 3 Oct 2017 · division

Priority

17 Jul 2014

Published

US 2018/0031506 A11 Feb 2018

Granted

8 Sep 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01N 27/12
By investigating resistance: of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid ,…
G01N 27/123
Circuits particularly adapted therefor, e.g. linearising circuits: for controlling the temperature
G01N 27/125
Of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in…:…
G01N 27/128
Of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in…:…

Integrated SMO gas sensor module

Life of this patent

Integrated SMO gas sensor module

Life of this patent

Abstract

Claims16