Sensor substrate arrangement for a particulate sensor device
AssigneeKYOCERA Corporation
InventorsHidekazu Otomaru, Takashi Kimura
Life of this patent
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AssigneeKYOCERA Corporation
InventorsHidekazu Otomaru, Takashi Kimura
Estimating the term…
There are provided a sensor substrate and a sensor device which have high detection accuracy. A sensor substrate includes an insulating substrate; sensing electrodes disposed in the insulating substrate, the sensing electrodes being columnar and being composed of at least one pair of positive and negative sensing electrodes, in the at least one pair of positive and negative sensing electrodes, part of a positive electrode and part of a negative electrode being each exposed from one surface of the insulating substrate; and innerlayer wiring lines embedded within the insulating substrate, the innerlayer wiring lines corresponding to the positive electrode and the negative electrode, respectively, in the at least one pair of positive and negative sensing electrodes.
A sensor substrate, comprising:
A sensor substrate, comprising:
Dependencies are inferred from the claim text.