Wavelength dispersive x-ray fluorescence spectrometer and x-ray fluorescence analyzing method using the same

A wavelength dispersive X-ray fluorescence spectrometer of a focusing optical system, the wavelength dispersive X-ray fluorescence spectrometer comprising:

• an X-ray source configured to irradiate a sample with primary X-rays;
• a divergence slit configured to allow secondary X-rays generated from the sample to pass therethrough;
• a spectroscopic device configured to monochromate and focus the secondary X-rays that have passed through the divergence slit;
• and
• a position sensitive detector configured to have a plurality of detection elements that are disposed in a spectral angle direction of the spectroscopic device, so as to detect intensities of the secondary X-rays at different spectral angles in focused secondary X-rays obtained by the secondary X-rays being focused by the spectroscopic device, by using the detection elements corresponding to the secondary X-rays at different spectral angles,
• the divergence slit, the spectroscopic device, and the position sensitive detector being fixed thereto, the wavelength dispersive X-ray fluorescence spectrometer comprising:
• a measured spectrum display unit configured to display a relationship between a position, in an arrangement direction, of each detection element, and a detected intensity by the detection element, as a measured spectrum, on a display;
• a detection area setting unit configured to allow an operator to set a peak area that is an area of the detection elements corresponding to fluorescent X-rays to be measured, and a background area that is an area of the detection elements corresponding to background of the fluorescent X-rays to be measured, in the arrangement direction of the detection elements;
• and
• a quantification unit configured to calculate, as a net intensity, an intensity of the fluorescent X-rays to be measured, based on a peak intensity obtained by integrating detected intensities by the detection elements in the peak area, a background intensity obtained by integrating detected intensities by the detection elements in the background area, and a background correction coefficient which is previously calculated, and to perform quantitative analysis.