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US 10,768,109 B2Granted
Chemical sensing based on plasmon resonance in carbon nanotubes
AssigneeInternational Business Machines Corporation
InventorsAli Afzali-Ardakani, Abram L. Falk, Damon B. Farmer, Shu-Jen Han, George S. Tulevski
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Abstract
A method of forming a chemical sensor includes forming a dielectric layer on an electrode. A carbon nanotube film is deposited on the dielectric layer. The carbon nanotube film is patterned into strips.
Claims20
A method of forming a chemical sensor, comprising:
- forming a dielectric layer on an electrode, including an oxide layer and a non-polar spacer layer;
- depositing a carbon nanotube film on the non-polar spacer layer of the dielectric layer, wherein the non-polar spacer layer controls coupling between polar photons in the oxide layer and plasmons in the carbon nanotube film;
- patterning the carbon nanotube film into a plurality of strips having a plasmon mode that overlaps with a vibrational mode of a chemical to be detected;
- and
- forming conductive contacts at ends of each of the plurality of strips.
2 more elements
A method of forming a chemical sensor, comprising:
- forming a dielectric layer on an electrode, including a silicon dioxide layer and a diamond-like carbon non-polar spacer layer on the silicon dioxide layer, the diamond-like carbon layer having a thickness of less than 40 nm;
- forming a doped carbon nanotube film on the non-polar spacer layer of the dielectric layer using a Langmuir-Schafer process, wherein the non-polar spacer layer controls coupling between polar photons in the oxide layer and plasmons in the carbon nanotube film;
- patterning the carbon nanotube film into a plurality of strips having a plasmon mode that overlaps with a vibrational mode of a chemical to be detected;
- and
- forming conductive contacts at ends of each of the plurality of strips.
2 more elements
Dependencies are inferred from the claim text.