Particle collecting apparatus and particle collecting system

A particle collecting method by a particle collecting apparatus comprising:

• forming a gap having a predetermined distance between a target object and a cylindrical housing having a closed top and an open bottom facing the target object;
• supplying a gas to the target objet from a supply port formed at the opening of the bottom in an annular shape along an inner wall surface of the housing;
• and
• sucking particles on the target object from an intake port positioned closer to a central axis of the supply port than the supply port;
• wherein the particle collecting apparatus comprises:
• a cylindrical member disposed along a central axis of the supply port;
• a partition plate configured to partition a gas supplied to the supply port and a gas sucked from the intake port;
• a first flow path, through which a gas supplied from an outside of the housing flows toward the supply port, formed between an inner wall surface of the housing and an outer wall surface of the partition plate, the first flow path having a ceiling that is gradually decreased while rotating about the central axis of the supply port in a direction in which the gas supplied from the outside of the housing flows;
• and
• a second flow path, through which the gas sucked from the intake port flows toward the outside of the housing, formed between an inner wall surface of the partition plate and an outer wall surface of the cylindrical member, the second flow path having a ceiling that is gradually increased while rotating about the cylindrical member in a direction in which the gas sucked from the intake port flows.

A particle collecting system comprising:

• a particle collecting apparatus;
• a gas supply unit configured to supply a gas to the particle collecting apparatus;
• a flow rate controller configured to control a flow rate of the gas supplied from the gas supply unit to the particle collecting apparatus;
• a suction pump configured to suck the gas from the particle collecting apparatus;
• and
• a flow speed meter configured to measure a flow speed of the gas sucked from the particle collecting apparatus by the suction pump,
• wherein the particle collecting apparatus includes:
• a cylindrical housing having a closed top and an open bottom facing a target object;
• a gap forming unit configured to form a gap having a predetermined distance between the bottom and the target object;
• a supply port formed at the opening of the bottom in an annular shape along an inner wall surface of the housing and configured to supply the gas supplied from the gas supply unit to the target object;
• an intake port provided closer to a central axis of the supply port than the supply port and configured to suck a gas containing particles on the target object by suction of the suction pump;
• cylindrical member disposed along a central axis of the supply port;
• a partition plate configured to partition a gas supplied to the supply port and a gas sucked from the intake port;
• a first flow path, through which a gas supplied from an outside of the housing flows toward the supply port, formed between an inner wall surface of the housing and an outer wall surface of the partition plate, the first flow path having a ceiling that is gradually decreased while rotating about the central axis of the supply port in a direction in which the gas supplied from the outside of the housing flows;
• and
• a second flow path, through which the gas sucked from the intake port flows toward the outside of the housing, formed between an inner wall surface of the partition plate and an outer wall surface of the cylindrical member, the second flow path having a ceiling that is gradually increased while rotating about the cylindrical member in a direction in which the gas sucked from the intake port flows.