High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam

A high resolution inspection apparatus using a terahertz Bessel beam, the high resolution inspection apparatus comprising:

• a terahertz wave generating unit generating a terahertz wave;
• a Bessel beam forming unit forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit;
• a first lens changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller;
• a second lens concentrating the terahertz wave passing through the first lens and toward a terahertz wave detection unit;
• the terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens;
• and
• the Bessel beam forming unit is a first axicon lens having an apical angle at which a diameter of the terahertz Bessel beam is smaller than a wavelength of the terahertz wave generated by the terahertz wave generating unit.