US 10,767,979 B2 · Optical measurement device and optical measurement method

Abstract

An error of a measured distance is reduced. An optical measurement device (100) includes: a light source (10), which emits lights; a sensor head (30), which condenses reflected lights reflected by a target (TA); a light reception portion (40), which is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount, and which obtains a light reception amount distribution signal of each pixel for the condensed reflected lights; a measurement portion (51), which measures a distance from the optical measurement device (100) to the target (TA) based on the light reception amount distribution signal; and a correction portion (52), which corrects the measured distance that is measured based on a predefined characteristic value in a waveform of the light reception amount distribution signal.

Claims14

Dependent claims

An optical measurement device, comprising:

a light source, which emits lights;
an optical system, which condenses reflected lights reflected by a target;
a light reception portion, which is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount, and which obtains a light reception amount distribution signal of each pixel for the reflected lights being condensed;
and
a processor, which measures a distance from the optical measurement device to the target based on the light reception amount distribution signal, and
corrects an error of the measured distance which is caused by a chromatic aberration of the optical system based on a predefined characteristic value in a waveform of the light reception amount distribution signal, wherein the predefined characteristic value is a half-value width.

3 more elements

An optical measurement method used by an optical measurement device, comprising:

a step in which a light source emits lights;
a step in which an optical system condenses reflected lights reflected by a target;
a step in which a light reception portion obtains a light reception amount distribution signal of each pixel for the reflected lights being condensed, and in which the light reception portion is configured in a manner that each of a plurality of pixels is capable of detecting a light reception amount;
a step in which a processor measures a distance from the optical measurement device to the target based on the light reception amount distribution signal;
and
a step in which the processor corrects an error of the measured distance which is caused by a chromatic aberration of the optical system based on a predefined characteristic value in a waveform of the light reception amount distribution signal, wherein the predefined characteristic value is a half-value width.

3 more elements

Dependencies are inferred from the claim text.

Optical measurement device and optical measurement method

Life of this patent

Optical measurement device and optical measurement method

Life of this patent

Abstract

Claims14