Scattered radiation defect depth detection

A method, comprising:

• (a) generating a light beam;
• (b) reflecting the light beam through a scan lens towards a first location on a transparent sample at an incident angle;
• (c) focusing a first scattered light from the transparent sample;
• (d) not filtering the first scattered light from the transparent sample;
• (e) measuring a first light intensity of the first scattered light from the transparent sample;
• (f) reflecting the light beam through a scan lens towards a second location on the transparent sample at the incident angle;
• (g) focusing a second scattered light from the transparent sample;
• (h) not filtering the second scattered light from the transparent sample;
• (i) measuring a second light intensity of the second scattered light from the transparent sample;
• and
• (j) determining a depth of defect in the transparent sample based at least in part on the first light intensity and the second light intensity.

An optical scanning system, comprising:

• a radiating source that outputs a light beam;
• a time varying beam reflector that is configured to reflect a first light and a second light through a scan lens towards a first location and a second location, respectively, on a transparent sample;
• a focusing lens configured to be irradiated by (i) the first light scattered from the transparent sample, and (ii) the second light scattered from the transparent sample;
• a first means for measuring (i) a first intensity of the first light scattered from the transparent sample, and (ii) a second intensity of the second light scattered from the transparent sample;
• and
• a second means for determining a depth of a defect on the transparent sample based at least in part on the first intensity, the second intensity, and a distance between the first location and the second location.