Fluid apparatus

A fluid apparatus that is installed in a piping through which a fluid used in a semiconductor manufacturing apparatus is allowed to flow, the fluid apparatus comprising:

• a body portion in which a fluid flow passage is formed, the fluid flow passage extending along an axis, and having a valve hole at one end of the fluid flow passage;
• and
• a valve element portion accommodated in the body portion in an advancing and retracting manner along the axis,
• wherein at least a portion of the valve element portion is made of a conductive fluororesin material containing a fluororesin material and carbon nanotubes dispersed in the fluororesin material, and is conductive with a grounding portion maintained at a ground potential,
• wherein a volume resistivity of the conductive fluororesin material falls within a range of larger than 1.0×103 Ω·cm and less than 1.0×104 Ω·cm,
• wherein the valve element portion has a tubular shape conforming to an inner peripheral surface of the body portion, the valve element portion comprising:
• a distal end portion, inserted into the valve hole, made of a non-conductive fluororesin material containing no carbon nanotubes;
• and
• a proximal end portion made of the conductive fluororesin material, the proximal end having:
• an inner space in communication with an other end of the fluid flow passage;
• and
• a flow hole allowing a fluid to flow between the inner space and the valve hole,
• wherein the body portion includes:
• a first body portion configured to support an outer peripheral surface of the valve element portion on a distal end side;
• and
• a second body portion configured to support an outer peripheral surface of the valve element portion on a proximal end side, the second body portion being disposed on an inner peripheral side of the first body portion,
• wherein the first body portion is made of a non-conductive fluororesin material containing no carbon nanotubes, and
• wherein the second body portion is made of the conductive fluororesin material, and is in contact with both a portion of the valve element portion, which is made of the conductive fluororesin material, and the grounding portion.