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AssigneePanasonic Corporation
InventorsKentaro Miyano, Naoto Yanagita, Naoya Ryoki, Takehiro Asahi, Masaki Nobuoka
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A ScAlMgO4 single crystal substrate having less collapse of crystal orientation, and a method for producing the single crystal substrate. A ScAlMgO4 single crystal substrate is provided, wherein, when a center of the substrate is designated as coordinates (0,0) and a measurement beam width is set to 1 [mm]×7 [mm] to conduct analysis according to an X-ray diffraction method at respective coordinate positions of (x−m,0) to (xm,0) at an interval of 1 [mm] in an x-axis direction and (0,y−n) to (0,yn) at an interval of 1 mm in a y-axis direction, wherein m and n are each an integer falling within the range so that the measurement beam is not stuck out from the substrate, a worst value of a full width at half maximum of a rocking curve at each of the coordinate positions is less than 20 [sec.].
A ScAlMgO4 single crystal substrate wherein, when a center of the substrate is designated as coordinates (0,0) and a measurement beam width is set to 1 [mm]×7 [mm] to conduct analysis according to an X-ray diffraction method at respective coordinate positions of (x−m,0) to (xm,0) at an interval of 1 [mm] in an x-axis direction and (0,y−n) to (0,yn) at an interval of 1 mm in a y-axis direction, wherein m and n are each an integer falling within the range so that the measurement beam is not stuck out from the substrate, a worst value of a full width at half maximum of a rocking curve at each of the coordinate positions is less than 20 [sec.].
Dependencies are inferred from the claim text.