Components with an atomic layer deposition coating and methods of producing the same
AssigneeAgilent Technologies, Inc.
InventorsElizabeth Carr, Kevin P. Killeen
Life of this patent
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Abstract
Liquid chromatography and gas chromatography components with a conformal protective coating on internal surfaces thereof and methods for producing the same are provided. The conformal protective coating is formed via an atomic layer deposition (ALD) process. The components and methods of the present disclosure find use in providing protective coatings for liquid chromatography and gas chromatography components that are compatible with bioanalytical separations and sensitive trace analyses.
Claims20
A component having a lumen with an interior surface covered with a conformal protective coating, wherein the conformal protective coating is formed via an atomic layer deposition process comprising:
- contacting the interior surface of the component with a first molecular precursor in a gas phase for a period of time such that the first molecular precursor reacts to form a deposit on the interior surface of the component, wherein
- the component is a tube or channel, and
- the component is a liquid chromatography device, a gas chromatography device, or a micro fluidic device;
- removing unreacted first molecular precursor and reaction byproducts, if any, from the component;
- and
- contacting the interior surface of the component with a second molecular precursor in a gas phase for a period of time such that the second molecular precursor reacts with the deposit to form a conformal protective coating on the interior surface of the component.
An atomic layer deposition method for coating with a conformal protective coating an interior surface of a component having a lumen, the method comprising:
- contacting the interior surface of the component with a first molecular precursor in a gas phase for a period of time such that the first molecular precursor reacts to form a deposit on the interior surface of the component, wherein
- the component is a tube or channel, and
- the component is a liquid chromatography device, a gas chromatography device, or a micro fluidic device;
- removing unreacted first molecular precursor and reaction byproducts, if any, from the component;
- and
- contacting the interior surface of the component with a second molecular precursor in a gas phase for a period of time such that the second molecular precursor reacts with the deposit to form a conformal protective coating on the interior surface of the component.
Dependencies are inferred from the claim text.