Hard titanium aluminum nitride coating, hard-coated tool, and their production methods
AssigneeMitsubishi Hitachi Tool Engineering, Ltd.
InventorsYuuzoh Fukunaga, Masayuki Imai
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Abstract
A titanium aluminum nitride coating having a columnar crystal structure, which is formed on a substrate, comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix1, Aly1)N, wherein x1 and y1 are numbers meeting x1=0.005-0.1, and y1=0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix2, Aly2)N, wherein x2 and y2 are numbers meeting x2=0.5-0.9, and y2=0.5-0.1 by atomic ratio; the high-Al TiAlN being surrounded by the network-like, high-Ti TiAlN.
Claims18
A hard titanium aluminum nitride coating having a columnar crystal structure, and comprising high-Al TiAlN having an fcc structure, which has a composition represented by (Tix1, Aly1)N, wherein x1 and y1 are numbers meeting x1=0.005-0.1, and y1=0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix2, Aly2)N, wherein x2 and y2 are numbers meeting x2=0.5-0.9, and y2=0.5-0.1 by atomic ratio;
- said high-Al TiAlN being surrounded by said network-like, high-Ti TiAlN, wherein said network-like means that said high-Ti TiAlN is distributed in a network form in a photomicrograph.
A hard-coated tool having a hard titanium aluminum nitride coating formed on a substrate, wherein said hard titanium aluminum nitride coating has a columnar crystal structure, and comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix1, Aly1)N, wherein x1 and y1 are numbers meeting x1=0.005-0.1, and y1=0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix2, Aly1)N, wherein x2 and y2 are numbers meeting x2=0.5-0.9, and y2=0.5-0.1 by atomic ratio;
- said high-Al TiAlN being surrounded by said network-like, high-Ti TiAlN, wherein said network-like means that said high-Ti TiAlN is distributed in a network form in a photomicrograph.
A method for producing a hard titanium aluminum nitride coating by chemical vapor deposition, comprising
- (1) using a mixture gas A comprising a TiCl4 gas, an AlCl3 gas, an N2 gas, and an H2 gas, and a mixture gas B comprising an NH3 gas, an N2 gas, and an H2 gas as starting material gases;
- (2) rotating first and second nozzles arranged with different distances from a rotation axis;
- and
- (3) ejecting said mixture gas A and said mixture gas B separately from said first and second nozzles.
A method for producing a hard-coated tool having a hard titanium aluminum nitride coating by chemical vapor deposition, comprising
- (1) using a mixture gas A comprising a TiCl4 gas, an AlCl3 gas, an N2 gas, and an H2 gas, and a mixture gas B comprising an NH3 gas, an N2 gas, and an H2 gas as starting material gases;
- (2) rotating first and second nozzles arranged with different distances from a rotation axis;
- (3) disposing a tool substrate around said first and second nozzles;
- and
- (4) ejecting said mixture gas A and said mixture gas B separately from said first and second nozzles.
Dependencies are inferred from the claim text.