Spray material, sprayed member and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYasushi Takai
Life of this patent
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Abstract
A spray material is defined as composite particles consisting essentially of (A) particles of rare earth fluoride and (B) particles of rare earth oxide, hydroxide or carbonate, consolidated together. The spray material is plasma sprayed onto a substrate to form a sprayed layer containing rare earth oxyfluoride in a consistent manner while minimizing the process shift and releasing few particles. The sprayed member has improved corrosion resistance to halogen-based gas plasma.
Claims20
A spray material comprising composite particles comprising (A) particles of rare earth fluoride and (B) particles of at least one rare earth compound selected from rare earth oxide, rare earth hydroxide, and rare earth carbonate,
- wherein the particles (A) and the particles (B) are consolidated together,
- wherein a crystal phase of the spray material comprises a first phase corresponding to the rare earth fluoride and a second phase corresponding to the at least one rare earth compound, and
- wherein the crystal phase of the spray material does not contain a phase corresponding to rare earth oxyfluoride.
Dependencies are inferred from the claim text.