Methods of minimizing particles on wafer from plasma spray coatings

A method comprising:

• performing two or more thermal cycles on a ceramic article comprising a body and a ceramic coating on at least one surface of the body, wherein the two or more thermal cycles expand and contract the ceramic coating to weaken bonds of particles to the ceramic coating, and wherein each thermal cycle of the two or more thermal cycles comprises:
• heating the ceramic article to a target temperature of about 100° C. to about 150° C. at a first ramping rate of about 3° C. per minute to about 10° C. per minute;
• maintaining the ceramic article at the target temperature for a first duration of time of about 5 minutes to about 20 minutes;
• cooling the ceramic article to a second target temperature of about 24° C. to 27° C. at a second ramping rate of about 2° C. per minute to about 10° C. per minute;
• and
• maintaining the ceramic article at the second target temperature for a second duration of time of about 2 seconds to about 20 minutes;
• and
• submerging the ceramic article in a bath for a third duration of time to remove the particles from the ceramic coating.

A method comprising:

• performing two or more thermal cycles on a ceramic article comprising a body and a ceramic coating on at least one surface of the body, wherein the two or more thermal cycles expand and contract the ceramic coating to weaken bonds of particles to the ceramic coating, and wherein each thermal cycle of the two or more thermal cycles comprises:
• heating the ceramic article to a first target temperature of about 100° C. to about 150° C. at a first ramping rate;
• maintaining the ceramic article at the first target temperature for a first duration of time, wherein the first duration of time is about 5 minutes to about 20 minutes;
• and
• cooling the ceramic article to a second target temperature at a second ramping rate;
• and
• submerging the ceramic article in a bath for a second duration of time to remove the particles from the ceramic coating.

A method comprising:

• performing two or more thermal cycles on a ceramic article comprising a body and a ceramic coating on at least one surface of the body, wherein the two or more thermal cycles expand and contract the ceramic coating to weaken bonds of particles to the ceramic coating, and wherein each thermal cycle of the two or more thermal cycles comprises:
• heating the ceramic article to a first target temperature of about 100° C. to about 150° C. at a first ramping rate;
• maintaining the ceramic article at the first target temperature for a first duration of time;
• and
• cooling the ceramic article to a second target temperature at a second ramping rate;
• and
• submerging the ceramic article in a bath for a second duration of time to remove the particles from the ceramic coating, wherein the bath is a bath of deionized water, and wherein submerging the ceramic article in the bath of deionized water for the second duration of time comprises alternating between ultrasonicating the ceramic article at a first frequency of about 40 kHz to about 60 kHz for a third duration of time and ultrasonicating the ceramic article at a second frequency of about 100 kHz to about 140 kHz for a fourth duration of time.