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US 10,766,822 B2Granted
Thermal spray material and thermal spray coated article
AssigneesTokyo Electron Limited, Fujimi Incorporated
InventorsNobuyuki Nagayama, Hiroyuki Ibe, Takaya Masuda
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Abstract
Provided is a thermal spray material that can form a compact thermal sprayed coating having an enhanced plasma erosion resistance. The herein disclosed art provides a thermal spray material that contains a rare earth element (RE), oxygen (O), and a halogen element (X) as constituent elements and that contains a mixed crystal of a rare earth element oxyhalide (RE-O—X) and a rare earth element halide (REX3).
Claims7
A thermal spray coated article, comprising:
- a substrate;
- and
- a thermal sprayed coating provided on the surface of the substrate, wherein the thermal sprayed coating comprises:
- a rare earth element, oxygen, and a halogen element as constituent elements;
- and
- a mixed crystal of a rare earth element oxyhalide and a rare earth element halide.
3 more elements
A thermal spray coated article comprising:
- a substrate;
- and
- a thermal sprayed coating provided on the surface of the substrate, wherein the thermal spray coating comprises:
- a rare earth element, oxygen, and a halogen element as constituent elements;
- and
- a mixed crystal of a rare earth element oxyhalide and rare earth element oxide.
3 more elements
Dependencies are inferred from the claim text.