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US 10,766,805 B2Granted
Edge polishing a glass substrate after cutting
AssigneeSeagate Technology LLC
InventorsJoachim Walter Ahner, David Marcus Tung, Daniel T. Jennings, Robin Davies, Ian J. Beresford
Life of this patent
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Abstract
A method includes projecting energy onto an annular edge of a glass substrate. The annular edge includes a first roughness. The first roughness is reduced to a second roughness with the energy. The energy reduces the first roughness without changing a roundness of the annular edge of the glass substrate.
Claims15
A method comprising:
- projecting plasma onto an annular edge of a glass substrate, wherein the annular edge has a first roughness;
- directing at least one laser beam onto the annular edge;
- and
- guiding the plasma with the at least one laser beam to reduce the first roughness to a second roughness with the plasma, wherein the plasma reduces the first roughness without changing a roundness of the annular edge of the glass substrate.
1 more element
A method comprising:
- generating a plasma column at an edge of a glass substrate, wherein the edge of the glass substrate includes a distribution of feature dimensions including higher feature dimensions and lower feature dimensions;
- directing at least one laser beam onto the edge of the glass substrate;
- rotating the edge of the glass substrate through the plasma column;
- and
- guiding the plasma column with the at least one laser beam to heat and reflow the edge of the glass substrate, wherein the reflowing reduces the higher feature dimensions to the lower feature dimensions.
2 more elements
A method comprising:
- applying a first energy, a second energy, and a third energy to an annular edge of a glass substrate, the first energy including a plasma and the second energy and third energy each including a laser beam;
- using the second and the third energy to guide the first energy onto the edge of the glass substrate to increase smoothness of the annular edge of the glass substrate, wherein
- a roundness of the annular edge remains the same after the applying the first energy, the second energy, and the third energy,
- the annular edge of the glass substrate includes higher features and lower features, and
- increasing the smoothness of the annular edge reduces a number of the higher features to increase a number of the lower features.
2 more elements
Dependencies are inferred from the claim text.