Planar cavity MEMS and related structures, methods of manufacture and design structures
AssigneeInternational Business Machines Corporation
InventorsChristopher V. Jahnes, Anthony K. Stamper
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Abstract
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
Claims10
A Micro-Electro-Mechanical System (MEMS) structure comprising:
- at least one electrode;
- at least one oxide peg above the at least one electrode;
- and
- a beam comprising at least one insulator layer over the at least one oxide peg,
- wherein the at least one electrode comprises a first electrode and a second electrode.
A Micro-Electro-Mechanical System (MEMS) structure comprising;
- at least one electrode;
- at least one oxide peg above the at least one electrode;
- a beam comprising at least one insulator layer over the at least one oxide peg;
- and
- an oxide material on the at least one insulator layer,
- wherein the oxide material has a depth of about 2.3 μm.
Dependencies are inferred from the claim text.