Piezoelectric device and method for manufacturing an inkjet head

A method for manufacturing an inkjet head, comprising:

• forming a plurality of pressure chambers and a flow path that links the plurality of pressure chambers in the substrate;
• and
• forming a plurality of piezoelectric elements that correspond to the plurality of pressure chambers, respectively, using the method for manufacturing a piezoelectric element that comprises
• forming a common electrode on a substrate
• forming a piezoelectric film on the common electrode;
• forming a plurality of individual electrodes on the other surface of the piezoelectric body film, at least two individual electrodes of the plurality of individual electrodes have different sizes to cause their associated piezoelectric film to have a uniform displacement amount when a voltage is applied to the at least two individual electrodes.