Work processing apparatus and method for manufacturing a processed work

A work processing apparatus, comprising:

• a vaporizer having:
• a vaporization part including a heat storage body having a heat capacity higher than that of a vaporization target liquid by a predetermined ratio, the vaporization target liquid being a carboxylic acid;
• and
• a heat supplier for supplying heat to the vaporization part;
• a chamber for processing a work therein, the chamber being configured to be able to be airtight from outside, where a flow path in the vaporizer through which the vaporization target liquid flows and an inside of the chamber are communicated with each other;
• and
• a vacuum pump for creating a negative pressure in the inside of the chamber and an inside of the flow path through which the vaporization target liquid flows;
• wherein the heat storage body has a heat storage body flow path formed therein, the heat storage body flow path being a flow path through which the vaporization target liquid flows;
• and
• wherein the predetermined ratio is a ratio of heat capacity at which a temperature drop of the heat storage body by heat transfer from the heat storage body to the vaporization target liquid flowing through the heat storage body flow path is within a predetermined range, wherein the amount of heat transferred from the heat storage body to the vaporization target liquid is an amount of heat necessary to vaporize the vaporization target liquid at a planned proportion.