Stage and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorTsutomu Hiroki
Life of this patent
Estimating the term…
Abstract
A stage includes a heat exchanger, a plate provided on the heat exchanger and including a first main surface and a second main surface opposite to each other, the plate having a plurality of through-holes extending in a plate thickness direction, and an electrostatic chuck having a top surface on which a substrate is mounted and a bottom surface attached to the first main surface. The heat exchanger includes a plurality of first tubes having a plurality of opening ends facing a plurality of regions on the bottom surface which are exposed to the respective through-holes and a plurality of second tubes communicating with the through-holes.
Claims8
A stage comprising:
- a heat exchanger;
- a plate provided on the heat exchanger and including a first main surface and a second main surface opposite to each other, the plate having a plurality of through-holes extending in a plate thickness direction;
- and
- an electrostatic chuck having a top surface on which a substrate is mounted and a bottom surface attached to the first main surface;
- wherein the heat exchanger includes:
- a plurality of first tubes having a plurality of opening ends facing a plurality of regions on the bottom surface which are exposed to the respective through-holes;
- and
- a plurality of second tubes communicating with the through-holes,
- wherein an area of the plate on the first main surface is greater than an area of the plate on a cross section, between the first main surface and the second main surface, which is in parallel with the first main surface.
A substrate processing apparatus comprising:
- a chamber main body having a chamber;
- and
- a stage comprising:
- a heat exchanger;
- a plate provided on the heat exchanger and including a first main surface and a second main surface opposite to each other, the plate having a plurality of through-holes extending in a plate thickness direction;
- and
- an electrostatic chuck having a top surface on which a substrate is mounted and a bottom surface attached to the first main surface;
- wherein the heat exchanger includes:
- a plurality of first tubes having a plurality of opening ends facing a plurality of regions on the bottom surface which are exposed to the respective through-holes;
- and
- a plurality of second tubes communicating with the through-holes,
- wherein the stage is provided in the chamber, and configured to discharge a heat transfer medium supplied from a medium temperature controller from the respective first tubes and return the heat transfer medium discharged from the respective first tubes to the medium temperature controller through the respective second tubes.
Dependencies are inferred from the claim text.