Circular ring shaped antifuse device
AssigneeInternational Business Machines Corporation
InventorsChih-Chao Yang, Baozhen Li
Life of this patent
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Abstract
An antifuse structure having enhanced programming efficiency is provided in which there is limited contact between the antifuse material and top and bottom electrodes. The antifuse material has a circular ring shape (i.e., donate shape having a hole in the middle (center) thereof) in which a dielectric material structure composed of a dielectric material having a dielectric constant of great than 4.0 is contained in the hole of the circular ring shaped antifuse material. The antifuse material is composed of a dielectric material having a lower dielectric breakdown strength as compared to the dielectric material structure.
Claims11
An antifuse structure comprising:
- a dielectric material structure composed of a dielectric material having a dielectric constant of greater than 4.0 and located directly on a first electrode composed of an electrically conductive metal or metal alloy;
- an antifuse element having a circular ring shape that laterally surrounds, and directly contacts, the dielectric material structure, wherein the antifuse element is located directly on the first electrode;
- and
- a second electrode located on an entirety of the dielectric material structure and partially located on the antifuse material.
Dependencies are inferred from the claim text.