Apparatus and system
AssigneeNexperia B.V.
InventorsRalph Huybers, Hans Van De Rijdt
Life of this patent
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Abstract
An apparatus is provided for transferring a semiconductor device from a wafer to a target position. The apparatus has at least one rotatable transfer assembly, which has a transfer head rotatable about an axis of rotation of the rotatable transfer assembly to transfer a semiconductor device from a pick-up position to a transfer position. The apparatus also has a transfer assembly actuator arrangement operative to effect movement of the at least one rotatable transfer assembly in an axial direction relative to a plane of rotation of the transfer head.
Claims12
An apparatus for transferring a semiconductor device from a wafer to a target position, comprising:
- a plurality of rotatable transfer assemblies comprising a first rotatable transfer assembly and a second rotatable transfer assembly, each rotatable transfer assembly comprising a transfer head rotatable about an axis of rotation of the rotatable transfer assembly, wherein the first rotatable transfer assembly is configured to rotate the transfer head thereof about the axis to a pick-up position to pick up the semiconductor device from the wafer and rotate the transfer head about the axis thereof to a transfer position, and wherein the transfer position comprises a position where the semiconductor device is located for transfer from the first rotatable transfer assembly to the second rotatable transfer assembly;
- and
- a transfer assembly actuator configured to effect movement of at least one of the plurality rotatable transfer assemblies in an axial direction relative to a plane of rotation of the transfer head, wherein the at least one rotatable transfer assembly is moveable in the axial direction simultaneously with transfer of the semiconductor device at the transfer position.
Dependencies are inferred from the claim text.