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US 10,705,114 B2Granted
Metrological scanning probe microscope
AssigneeOxford Instruments Asylum Research Inc
InventorsAleksander Labuda, Deron Walters, Jason Cleveland, Roger Proksch
Life of this patent
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Abstract
This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
Claims14
An atomic force microscope system that operates to characterize a piezoelectric sample, comprising:
- an atomic force microscope probe having a cantilever with a cantilever tip;
- the cantilever tip in contact with the piezoelectric sample,
- a bias voltage source, producing a bias voltage between the cantilever tip and the piezoelectric sample, the bias voltage source modulating the bias voltage periodically to generate an oscillating electric field below the cantilever tip, which leads to localized deformations in a surface of the sample, which deformations act as a mechanical drive for the cantilever tip;
- a controller which determines a contact resonance frequency of the cantilever tip on the sample;
- and
- a tip amplitude detector which measures a magnitude of effective piezoelectric response of the surface, as an amplitude of a tip displacement divided by an amplitude of the bias voltage between the tip and sample, where the tip amplitude detector measures the response at a spot on the cantilever,
- and where a location of the spot on the cantilever is adjustable,
- and where the tip amplitude detector optimizes the spot by adjusting the location using iterative minimization of the measured frequency response around the resonance frequency.
5 more elements
An atomic force microscope system that operates to characterize a piezoelectric sample, comprising:
- an atomic force microscope probe having a cantilever with a cantilever tip;
- the cantilever tip in contact with the piezoelectric sample,
- a bias voltage source, producing a bias voltage between the cantilever tip and the piezoelectric sample, the bias voltage source modulating the bias voltage periodically to generate an oscillating electric field below the cantilever tip, which leads to localized deformations in a surface of the sample, which deformations act as a mechanical drive for the cantilever tip;
- a controller which determines a contact resonance frequency of the cantilever tip on the sample;
- and
- a tip amplitude detector which measures a magnitude of effective piezoelectric response of the surface, as an amplitude of a tip displacement divided by an amplitude of the bias voltage between the tip and sample, where the tip amplitude detector measures the response at a spot on the cantilever,
- and where a location of the spot on the cantilever is adjustable,
- and where the tip amplitude detector optimizes the spot by adjusting the location using iterative minimization of the measured frequency response around the resonance frequency to place the spot on the cantilever directly over the cantilever tip.
5 more elements
Dependencies are inferred from the claim text.