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US 10,704,162 B2Granted
Aluminum nitride single crystal
AssigneeJfe Mineral Company, Ltd.
InventorsYosuke Iwasaki, Keiichiro Nakamura
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Abstract
Provided is an aluminum nitride single crystal which is easier to cut than conventional ones. The presently disclosed aluminum nitride single crystal 1 has a matrix region M constituting a matrix of the aluminum nitride single crystal, and at least one domain region D included in the matrix region M.
Claims4
An aluminum nitride single crystal manufactured by a sublimation method, comprising
- a matrix region that constitutes a matrix of the aluminum nitride single crystal, and
- at least one domain region included in the matrix region,
- wherein, in a cross section perpendicular to a crystal growth direction of the aluminum nitride single crystal, the aluminum nitride single crystal has an outer peripheral portion within 3 mm inside an outer peripheral of the aluminum nitride single crystal and an inside portion more inside than the outer peripheral portion in a radial direction of the aluminum nitride single crystal, and
- the at least one domain region is only in the outer peripheral portion.
1 more element
Dependencies are inferred from the claim text.