Damping system for a mobile mass of a MEMS device

A damping system for a movable mass (2) of a MEMS device (1),

• the system being able to prevent a direct contact between the mass (2) and a surface element (3) of the MEMS device (1), the mass (2) being movable in translation relative to the surface element (3) along a first direction (D1), the damping system comprising:
• a mechanical stopper (4) with elastic properties, positioned between the mass (2) and the surface element (3),
• the stopper (4) being oriented along a second direction when it is in a rest position (PBR),
• a system (5) for locking/unlocking the stopper (4),
• wherein the locking/unlocking system (5) comprises:
• a branch (51) oriented towards the stopper (4), comprising a blocking end (53),
• a pivot link (54) capable of pivoting the branch (51) along an axis (A) of rotation substantially perpendicular to the first direction (D1) and to the second direction,
• the locking/unlocking system (5) defining the two following positions of the mass (2) along the first direction (D1) of translation:
• a central position (PMC) of the mass (2), the mass (2) being urged in said central position (PMC) by return means (21, 22), each connected to the mass and to a structure of the MEMS device fixed relative to the surface element (3),
• a first end position (PM1) where the mass (2) is brought closer to the surface element (3) relative to its central position (PMC), the stopper (4) being pressed towards the surface element (3) along a locked position (PBV), the branch (51) being configured to block the stopper (4) in this locked position (PBV) by its blocking end (53),
• the locking/unlocking system being rotatable about the pivot link (54), up to a position where the stopper (4) is not held in the locked position (PBV).