Stocker
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsGuan-Cyun Li, Chi-Feng Tung, Fu-Hsien Li, Hsiang-Yin Shen
Life of this patent
Estimating the term…
Abstract
A stocker for storing a plurality of wafer carriers is provided. The stocker includes a frame, a plurality of pod stoppers, a plurality of truss members and a plurality of partitions. The frame includes a plurality of stocking units. Each of the stocking units includes a carrying plate for carrying one of the plurality of wafer carriers. The pod stoppers stand on an edge of each of the carrying plates. The truss members are disposed diagonally across at least one side surface of at least one of the stocking units, wherein each of the truss members comprises a shock absorber. The partitions are disposed on side surfaces of the stocking units and fixed to the frame.
Claims13
A stocking system, comprising:
- a plurality of wafer carriers;
- a frame comprising a plurality of stocking units for storing the plurality of wafer carriers;
- a plurality of truss members disposed diagonally across at least one side surface of at least one of the stocking units;
- and
- a plurality of partitions disposed on side surfaces of the stocking units and fixed to the frame,
- wherein the plurality of stocking units respectively comprise a carrying plate and a positioning pin disposed on a front portion of the carrying plate, such that each wafer carrier leans against the corresponding positioning pin and is tilted toward a back portion of the corresponding carrying plate.
A stocker for storing a plurality of wafer carriers, comprising:
- a frame comprising a plurality of stocking units, wherein each of the stocking units comprises a carrying plate for carrying one of the plurality of wafer carriers;
- a plurality of pod stoppers standing on an edge of each of the carrying plates;
- a plurality of truss members disposed diagonally across at least one side surface of at least one of the stocking units, wherein each of the truss members comprises a shock absorber;
- and
- a plurality of partitions disposed on side surfaces of the stocking units and fixed to the frame,
- wherein the carrying plates are configured to support the plurality of wafer carriers from below the plurality of wafer carriers, the pod stoppers extend from a top surface of the corresponding carrying plate on which the corresponding wafer carrier is placed, and configured to restrain movement of the corresponding wafer carrier.
The stocker as claimed in 8, further comprising:
- two positioning pins disposed on a front portion of each of the carrying plates, such that each of the wafer carriers leans against the positioning pins and is tilted toward a back portion of each of the carrying plates.
Dependencies are inferred from the claim text.