Lithographic apparatus, a dryer and a method of removing liquid from a surface

A liquid handling structure for a lithographic projection apparatus, the liquid handling structure comprising a liquid confinement body configured to at least partly confine a liquid to a space between a projection system of the lithographic projection apparatus and a table and wherein the liquid handling structure comprises:

• a first supply opening to supply the liquid to the space;
• a first porous member part located outward, relative to a path of a radiation beam from the projection system passing through the space, of the first supply opening, the first porous member part configured to extract at least part of the liquid and the first porous member being in a line segment form that is elongate in a direction substantially parallel to a top surface of the table;
• a second supply opening configured to supply fluid in a volume between the liquid handling structure and the table, the second supply opening located outward, relative to the path, of the first porous member part;
• and
• a second porous member part located outward, relative to the path, of the second supply opening and the first porous member part, the second porous member part configured to extract at least part of the liquid.

A liquid handling structure for a lithographic projection apparatus, the liquid handling structure configured to process a liquid in a space between a projection system of the lithographic projection apparatus and a table and wherein the liquid handling structure comprises;

• a first porous member located outward of a path of a radiation beam from the projection system passing through the space, the first porous member configured to extract at least part of the liquid in the space coming from inward of the first porous member and the first porous member being in a line segment form that is elongate in a direction substantially parallel to a top surface of the table;
• a supply opening configured to supply fluid in a volume between the liquid handling structure and the table, the supply opening located outward, relative to the path, of the first porous member;
• and
• a second porous member separate from the first porous member, the second porous member located outward, relative to the path, of the supply opening, the second porous member configured to extract at least part of the liquid.