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US 10,649,346 B2Granted
Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus
AssigneeASML Netherlands B.V.
InventorsTakeshi Kaneko, Joost Jeroen Ottens, Raymond Wilhelmus Louis Lafarre
Life of this patent
Estimating the term…
Abstract
A table for a lithographic apparatus, the table having an encoder plate located on the table, a gap between the encoder plate and a top surface of the table, the gap located radially inward of the encoder plate relative to the periphery of the table, and a fluid extraction system with an opening in the surface of the gap to extract liquid from the gap.
Claims20
A table for a lithographic apparatus, the table comprising:
- a substrate support to support a substrate for exposure by the lithographic apparatus;
- a top surface arranged such that there is an inner gap that is outward, in the horizontal, of the substrate when supported by the substrate support and is inward, in the horizontal, of the top surface;
- an encoder plate located in, or on, the top of the table, the encoder plate arranged such that there is an outer gap between the encoder plate and the top surface of the table, the outer gap located inward, in the horizontal, of the encoder plate relative to the periphery of the table and outward, in the horizontal, of the inner gap;
- and
- a fluid opening in a surface of the table for extraction of liquid from the outer gap.
2 more elements
A table for a lithographic apparatus, the table comprising:
- a support region to support an object for use by the lithographic apparatus;
- a measurement system component;
- an inner gap that is outward, in the horizontal, of the object when supported by the support region and is inward, in the horizontal, of the measurement system component;
- an encoder plate located in, or on, the top of the table, the encoder plate arranged such that there is an outer gap between the encoder plate and a top surface of the table, the outer gap located inward, in the horizontal, of the encoder plate relative to the periphery of the table and outward, in the horizontal, of the measurement system component;
- and
- a fluid opening in a surface of the table for extraction of, liquid from the outer gap.
3 more elements
A table for a lithographic apparatus, the table comprising:
- a support region to support an object for use by the lithographic apparatus;
- an inner gap that is outward, in the horizontal, of the object when supported by the support region and is inward, in the horizontal, of a periphery of the table;
- an encoder plate located in, or on, the top of the table, the encoder plate arranged such that there is an outer gap between the encoder plate and a top surface of the table, the outer gap located inward, in the horizontal, of the encoder plate relative to the periphery of the table and outward, in the horizontal, of the inner gap;
- and
- a fluid opening for extraction of liquid from the outer gap.
2 more elements
Dependencies are inferred from the claim text.