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US 10,649,326 B2Granted
Pellicle frame and a pellicle using the same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorAkinori Nishimura
Life of this patent
Estimating the term…
Abstract
There is provided a pellicle frame and a pellicle using the frame, which has a hollow space inside a corner portion of the frame and optionally one or more hollow spaces in a straight portion (bar) of the frame, and also a hollow space in a corner portion of the frame may communicate with a neighboring hollow space in a straight portion of the frame.
Claims20
A pellicle frame, comprising:
- a frame body having a first surface and a second surface facing each other, and an inner surface and outer surface each of which connects the first surface and the second surface, each of the first surface and the second surface having a polygonal frame shape, the polygonal frame shape having straight portions and corner portions each connecting two adjacent straight portions among the straight portions,
- wherein the frame body comprises a first hollow portion in at least one of the corner portions and a second hollow portion in at least one of the straight portions, the first hollow portion and the second hollow portion each having no opening at the first surface or the second surface, and
- an area of a first cross section of the first hollow portion in the at least one of the corner portions is larger than an area of the second cross section of the second hollow portion in the at least one of the straight portions, provided that the first cross section and the second cross section are each perpendicular to a circumferential direction of the polygonal frame shape.
A pellicle frame, comprising:
- a frame body having a polygonal frame shape, the polygonal frame shape having straight portions and corner portions connecting two adjacent straight portions among the straight portions,
- wherein a sectional secondary moment of inertia at at least one of the corner portions of the frame body is smaller than a sectional secondary moment of inertia at the straight portions of the frame body.
Dependencies are inferred from the claim text.