US 10,541,165 B2 · Systems, apparatus, and methods for an improved load port backplane

Abstract

Embodiments provide systems, apparatus, and methods for an improved load port that includes a backplane assembly supporting a docking tray and a substrate carrier opener, wherein the backplane assembly includes a backplane; a leveling block coupleable to an equipment front end module (EFEM); a conical hole adjustment assembly coupled between the leveling block and the backplane; and a slotted hole adjustment assembly coupled between the leveling block and the backplane. The conical hole adjustment assembly includes a conical hole block coupled to the leveling block at a first end; a threaded block coupled to the backplane; and an adjustment bolt coupled to the conical hole block and the threaded block. Numerous additional aspects are disclosed.

Claims14

Dependent claims

A load port system comprising:

a backplane assembly supporting a docking tray and a substrate carrier opener, wherein the backplane assembly comprises:
a backplane component;
a leveling block configured to mount to an equipment front end module (EFEM);
a conical hole adjustment assembly configured to couple between a first distal end of the leveling block and the backplane component;
and
a slotted hole adjustment assembly configured to couple between a second distal end of the leveling block and the backplane component, wherein the conical hole adjustment assembly comprises:
a conical hole block configured to mount to the first distal end of the leveling block;
a first threaded block configured to mount to the backplane component;
and
a first adjustment bolt configured to couple the conical hole block with the first threaded block to align the backplane component with the EFEM.

7 more elements

Dependencies are inferred from the claim text.

Systems, apparatus, and methods for an improved load port backplane

Life of this patent

Systems, apparatus, and methods for an improved load port backplane

Life of this patent

Abstract

Claims14