Pellicle attachment apparatus

A pellicle attachment apparatus, comprising:

• a support structure configured to support a pellicle frame;
• a pellicle handling system configured to place the pellicle onto the pellicle frame;
• and
• actuators configured to provide relative movement between the pellicle frame and the pellicle before the pellicle is placed on the pellicle frame,
• wherein the support structure includes windows positioned to allow pellicle border edges and/or pellicle frame edges to be visible from an opposite side of the support structure.

A pellicle attachment apparatus, comprising:

• a support structure configured to support a pellicle frame;
• a pellicle handling system configured to place the pellicle onto the pellicle frame;
• and
• actuators configured to provide relative movement between the pellicle frame and the pellicle before the pellicle is placed on the pellicle frame,
• wherein the pellicle attachment apparatus further comprises arms that are configured to apply pressure on the pellicle when it has been placed on the pellicle frame, thereby holding the pellicle on the pellicle frame during curing of glue at an interface between the pellicle and the pellicle frame.

A method of attaching a pellicle to a pellicle frame, the method comprising:

• using a pellicle frame handling system to place the pellicle frame on a support structure;
• applying glue to the pellicle frame;
• securing a pellicle to support arms of a pellicle handling system by applying a vacuum that sucks a border of the pellicle towards a foot of each support arm;
• holding a pellicle above the pellicle frame using the pellicle handling system;
• aligning the pellicle frame and the pellicle;
• and
• placing the pellicle onto the pellicle frame.