MEMS manufacturing system and MEMS manufacturing method

A method of manufacturing a MEMS performed by a MEMS manufacturing system having an image acquirement unit having a stage on which the MEMS is placed and acquiring image information of the MEMS and a manufacturing process unit creating a three-dimensional image of the device formed on the MEMS from the image information acquired by the image acquirement unit, analyzing the created three-dimensional image to estimate a property of the device, and correcting a manufacturing recipe of the MEMS, the method comprising the steps of:

• allowing the manufacturing process unit to set the stage at a first stage inclination angle at which an inclination angle of the stage on which the MEMS is placed is set;
• allowing the image acquirement unit to acquire each of a first image that is an image of a reference mark formed on the MEMS placed on the stage set at the first inclination angle and a third image that is an image of the device;
• allowing the manufacturing process unit to set the stage at a second stage inclination angle at which an inclination angle of the stage on which the MEMS is placed is set;
• allowing the image acquirement unit to acquire each of a second image that is an image of a reference mark formed on the MEMS placed on the stage set at the second inclination angle and a fourth image that is an image of the device;
• and
• allowing the manufacturing process unit to create three-dimensional data of the image of the device from the third image and the fourth image,
• wherein, at the step of creating the three-dimensional data, the inclination angles of the stage are calculated from the reference mark of the acquired first image and the reference mark of the acquired second image, respectively, each of a difference between the first stage inclination angle and the inclination angle of the stage calculated from the first image and a difference between the second stage inclination angle and the inclination angle of the stage calculated from the second image is calculated, and each of the calculated differences among the inclination angles is used as a correction value for creating the three-dimensional data.