Electron beam generation for transmission electron microscope
AssigneeTechnische Universiteit Eindhoven
InventorOtger Jan Luiten
Life of this patent
Estimating the term…
Abstract
In one aspect, the present invention provides a method of generating an electron beam in a transmission electron microscopy device. The method includes: generating an electron pulse [306] by a pulsed electron source [300], accelerating the electron pulse in a first resonant microwave cavity [302], passing the accelerated electron pulse through a drift space [314], and correcting the energy spread of the accelerated electron pulse in a second resonant microwave cavity [304] by operating it out of phase by 90 degrees from the first resonant cavity [302].
Claims15
A method of generating an electron beam in a transmission electron microscopy device, the method comprising:
- generating an electron pulse by a pulsed electron source;
- accelerating the electron pulse in a first resonant microwave cavity;
- passing the accelerated electron pulse through a drift space;
- and
- correcting an energy spread of the accelerated electron pulse in a second resonant microwave cavity by operating the second resonant microwave cavity out of phase by 90 degrees from the first resonant cavity.
A device for generating an electron beam, the device comprising:
- a pulsed electron source configured to generate an electron pulse;
- a first resonant microwave cavity configured to accelerate the electron pulse;
- a second resonant microwave cavity configured to correct an energy spread of the accelerated electron pulse;
- a drift space separating the first resonant microwave cavity from the second resonant microwave cavity;
- a phase shifter connected to the first resonant microwave cavity and the second resonant microwave cavity, configured to adjust an RF phase difference between the first resonant microwave cavity and the second resonant microwave cavity to a value substantially equal to 90 degrees.
Dependencies are inferred from the claim text.