Ceramic carrier and sensor element, heating element and sensor module, each with a ceramic carrier and method for manufacturing a ceramic carrier

A sensor module, the sensor module comprising:

• an Al2O3 carrier for reducing mechanical stresses, the Al2O3 carrier comprising
• an Al2O3 body;
• and
• a thin-film structure comprising platinum or comprising a platinum alloy the thin-film structure comprising a first coefficient of thermal expansion;
• and
• a surface of the Al2O3 carrier having an intermediate layer on which the thin-film structure is arranged, the intermediate layer comprising a second coefficient of thermal expansion from 8*10−6/K to 16*10−6/K;
• wherein the first cover layer is sealed hermetically by a second cover layer comprising glass;
• wherein Al2O3 is at least 99% by weight of the Al2O3 carrier;
• wherein the second coefficient of thermal expansion is greater at most by a factor of 1.5 than the first coefficient of thermal expansion, and
• wherein the intermediate layer consists of an electrically insulating metal oxide.

A method of making an Al2O3 carrier, the Al2O3 carrier for reducing mechanical stresses, the Al2O3 carrier comprising

• an Al2O3 body;
• and
• a thin-film structure comprising platinum or comprising a platinum alloy the thin-film structure comprising a first coefficient of thermal expansion;
• and
• a surface of the Al2O3 carrier having an intermediate layer on which the thin-film structure is arranged, the intermediate layer comprising a second coefficient of thermal expansion from 8*10−6/K to 16*10−6/K;
• wherein Al2O3 is at least 99% by weight of the Al2O3 carrier;
• wherein the second coefficient of thermal expansion is greater at most by a factor of 1.5 than the first coefficient of thermal expansion, and
• wherein the intermediate layer consists of an electrically insulating metal oxide;
• the method comprising the steps of:
• applying the intermediate layer to the surface of the Al2O3 carrier by a thin-film method, or
• applying the undular conductor track to the surface of the Al2O3 carrier by the thin-film method.